00851naa#a2200217#i#450# EN\\bibl\29946 20240514082137.2 2071-7318 20160125b2016####ek#y0engy0150####ca RU EFFECT OF NITROGEN CONCENTRATION IN MAGNETRON SPUTTERING ON STRUCTURE ALN-FILMS DEPOSITED ON SAPPHIRE SUBSTRATE Journal article Belgorod Belgorod State Technological University named after V.G. Shukhov 2016 5 с. Journal article local Химическая технология. Химическая промышленность. Родственные отрасли. 66 Narcev V.M. Zaycev Sergey Viktorovich Prohorenkov D. S. Evtushenko E. I. Vaschilin V.S. bulletinbstu.editorum.ru