00851naa#a2200217#i#4500001001500000005001700015011001400032100004100046102000700087200013300094210008500227215001000312608002700322675014000349700001800489700003100507700002300538700002200561700002100583856002900604EN\\bibl\2994620240514043728.2##a2071-7318##a20160125b2016####ek#y0engy0150####ca##aRU1#aEFFECT OF NITROGEN CONCENTRATION IN MAGNETRON SPUTTERING ON STRUCTURE ALN-FILMS DEPOSITED ON SAPPHIRE SUBSTRATEeJournal article1#aBelgorodcBelgorod State Technological University named after V.G. Shukhovd2016##a5 с.##aJournal article2local##aХимическая технология. Химическая промышленность. Родственные отрасли. 66#1aNarcevgV.M. #1aZaycevgSergey Viktorovich#1aProhorenkovgD. S.#1aEvtushenkogE. I.#1aVaschilingV.S. 4#abulletinbstu.editorum.ru