TY  JOUR
TI  EFFECT OF NITROGEN CONCENTRATION IN MAGNETRON SPUTTERING ON STRUCTURE ALN-FILMS DEPOSITED ON SAPPHIRE SUBSTRATE
KW  aluminum nitride
KW  sapphire
KW  magnetron sputtering
KW  structure
JO  Bulletin of Belgorod State Technological University named after. V. G. Shukhov
AU  Narcev, V..
AU  Zaycev, S.V.
AU  Prohorenkov, D.S.
AU  Evtushenko, E.I.
AU  Vaschilin, V..
PY  2016
IS  1
PB  Belgorod State Technological University named after V.G. Shukhov