%0 Journal Article
%T EFFECT OF NITROGEN CONCENTRATION IN MAGNETRON SPUTTERING ON STRUCTURE ALN-FILMS DEPOSITED ON SAPPHIRE SUBSTRATE
%A Narcev, V..
%A Zaycev, S.V.
%A Prohorenkov, D.S.
%A Evtushenko, E.I.
%A Vaschilin, V..
%K aluminum nitride, sapphire, magnetron sputtering, structure
%J Bulletin of Belgorod State Technological University named after. V. G. Shukhov
%D 2016
%N 1
%P 5
%I Belgorod State Technological University named after V.G. Shukhov