@article{Narcev2016effect,
author={Narcev, V.. and Zaycev, S.V. and Prohorenkov, D.S. and Evtushenko, E.I. and Vaschilin, V..},
title={EFFECT OF NITROGEN CONCENTRATION IN MAGNETRON SPUTTERING ON STRUCTURE ALN-FILMS DEPOSITED ON SAPPHIRE SUBSTRATE},
journal={Bulletin of Belgorod State Technological University named after. V. G. Shukhov},
publisher={Belgorod State Technological University named after V.G. Shukhov},
year={2016},
pages={144-149},
volume={1},
issue={1},
}