%0 Journal Article %T GROWTH OF LOW DISLOCATION GaN AND AlGaN layers by ammonia mbe %A Mamaev, V.V. %A Novikov, S.A. %A Petrov, S.I. %A Zaycev, S.V. %A Prohorenkov, D.S. %K nitride heterostructures, AlN, AlGaN, UV optoelectronic devices, microwave transistors, dislocation density %J Bulletin of Belgorod State Technological University named after. V. G. Shukhov %D 2016 %N 1 %P 4 %I Belgorod State Technological University named after V.G. Shukhov