TY JOUR TI THE INFLUENCE OF CONDITIONS OF FORMATION OF HETEROSTRUCTURES BASED ON NITRIDES OF III GROUP, ON THE STRUCTURAL PERFECTION OF THE INSTRUMENT STRUCTURES FOR MICROWAVE TRANSISTORS, AND OPTOELECTRONIC DEVICES IN THE ULTRAVIOLET RANGE. KW nitride heterostructures AlN/AlGaN UV photo cathodes KW microwave transistors KW the density of dislocations JO Bulletin of Belgorod State Technological University named after. V. G. Shukhov AU Mamaev, V.V. AU Novikov, S.A. AU Petrov, S.I. AU Zaycev, S.V. AU Prohorenkov, D.S. PY 2017 IS 2 PB Belgorod State Technological University named after V.G. Shukhov